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Abstract


Si2H6�̔M�����ɂ�萅�f���P�C�f�N���X�^�[�̐����@�\�ɂ‚��āA�^�󎇊O���[�U�[���C�I������s���Ԏ��ʕ��͖@�y�є����V�~�����[�V�����ɂ�茟�������B�������x�̏㏸�ƂƂ��ɁAH2�̒E���ߒ����Ƃ��Ȃ�SinH2n�ASinH2n-2�̐����̑������m�F���ꂽ�B

Detectionofhydrogenatedsiliconclustersduringthermaldecompositionofdisilaneinaflowreactorwasperformedusingtime-of-flightmassspectrometrycoupledwithvacuumultravioletphotoionizationinatemperaturerangeof298-860K TheSinH2n+2,SinH2n,SinH2n-2,andSinH2n-4containinguptotensiliconatomswereobservedasgas-phaseproductsduringthedisilanepyrolysis